Interface analysis for CdMgTe and AlGaAs multilayer systems using ellipsometric method

Tae Ho Ghong; Tae Jung Kim; Yong Sub Ihn; Young Dong Kim; Euijoon Yoon

Interface analysis for CdMgTe and AlGaAs multilayer systems using ellipsometric method

Tae Ho Ghong, Tae Jung Kim, Yong Sub Ihn, Young Dong Kim, Euijoon Yoon

Research output: Contribution to journal › Conference article › peer-review

Abstract

We discuss the accuracy and detectability of interface layers in the analysis of ellipsometric spectra in the Cd_1-xMg_xTe and Al_1-xGa_xAs alloy systems. In this study, we observed that the conventional ellipsometric analysis using the Bruggeman effective medium approximation could not easily detect the existence of interface layer, while our approach with alloy dielectric function showed significant difference when the interface existed.

Original language	English
Pages (from-to)	481-484
Number of pages	4
Journal	Institute of Physics Conference Series
Volume	184
Publication status	Published - 2005
Event	31st International Symposium of Compound Semiconductors 2004 - Seoul, Korea, Republic of Duration: 12 Sept 2004 → 16 Dec 2004

Cite this

@article{f76aad1eba524f1798c0a1f7d20e917d,

title = "Interface analysis for CdMgTe and AlGaAs multilayer systems using ellipsometric method",

abstract = "We discuss the accuracy and detectability of interface layers in the analysis of ellipsometric spectra in the Cd1-xMgxTe and Al1-xGaxAs alloy systems. In this study, we observed that the conventional ellipsometric analysis using the Bruggeman effective medium approximation could not easily detect the existence of interface layer, while our approach with alloy dielectric function showed significant difference when the interface existed.",

author = "Ghong, {Tae Ho} and Kim, {Tae Jung} and Ihn, {Yong Sub} and Kim, {Young Dong} and Euijoon Yoon",

year = "2005",

language = "English",

volume = "184",

pages = "481--484",

journal = "Institute of Physics Conference Series",

issn = "0951-3248",

publisher = "IOP Publishing Ltd.",

}

TY - JOUR

T1 - Interface analysis for CdMgTe and AlGaAs multilayer systems using ellipsometric method

AU - Ghong, Tae Ho

AU - Kim, Tae Jung

AU - Ihn, Yong Sub

AU - Kim, Young Dong

AU - Yoon, Euijoon

PY - 2005

Y1 - 2005

N2 - We discuss the accuracy and detectability of interface layers in the analysis of ellipsometric spectra in the Cd1-xMgxTe and Al1-xGaxAs alloy systems. In this study, we observed that the conventional ellipsometric analysis using the Bruggeman effective medium approximation could not easily detect the existence of interface layer, while our approach with alloy dielectric function showed significant difference when the interface existed.

AB - We discuss the accuracy and detectability of interface layers in the analysis of ellipsometric spectra in the Cd1-xMgxTe and Al1-xGaxAs alloy systems. In this study, we observed that the conventional ellipsometric analysis using the Bruggeman effective medium approximation could not easily detect the existence of interface layer, while our approach with alloy dielectric function showed significant difference when the interface existed.

UR - http://www.scopus.com/inward/record.url?scp=33644526912&partnerID=8YFLogxK

M3 - Conference article

AN - SCOPUS:33644526912

SN - 0951-3248

VL - 184

SP - 481

EP - 484

JO - Institute of Physics Conference Series

JF - Institute of Physics Conference Series

T2 - 31st International Symposium of Compound Semiconductors 2004

Y2 - 12 September 2004 through 16 December 2004

ER -

Interface analysis for CdMgTe and AlGaAs multilayer systems using ellipsometric method

Abstract

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