Lithographic resolution enhancement of a maskless lithography system based on a wobulation technique for flow lithography

Kibeom Kim, Sangkwon Han, Jinsik Yoon, Sunghoon Kwon, Hun Kuk Park, Wook Park

Research output: Contribution to journal › Article › peer-review

35 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Lithographic resolution enhancement of a maskless lithography system based on a wobulation technique for flow lithography'. Together they form a unique fingerprint.

Engineering

Material Science