Abstract
GaN nano-grains were grown on nominally 0.3°-miscut (0 0 0 1) sapphire substrates by hydride vapor phase epitaxy (HVPE). Ordering behavior of the nano-grains was investigated by utilizing scanning electron microscopy (SEM) and synchrotron X-ray scattering. SEM images and synchrotron X-ray scattering measurement revealed that the nano-grains were nucleated with long-range ordering along the sapphire [1 0 over(1, -) 0], which is the same as the miscut direction. With an increased growth time the nano-grains gradually coalesced, but the long-range ordering was still observed even after completion of the coalescence.
Original language | English |
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Pages (from-to) | 3278-3281 |
Number of pages | 4 |
Journal | Journal of Crystal Growth |
Volume | 310 |
Issue number | 14 |
DOIs | |
Publication status | Published - 1 Jul 2008 |
Bibliographical note
Funding Information:This work was supported in part by the Seoul Research and Business Development Program-Grant no. 10583.
Keywords
- A1. Nucleation
- A1. X-ray diffraction
- A3. Hydride vapor phase epitaxy
- B1. Nitrides
- B2. Semiconducting III-V materials