Abstract
We demonstrate the low-cost AlZnO/ZnO TFT by spray pyrolysis at 350oC. High field-effect mobility is achieved over 80 cm2/V.s with a subthreshold slope of 123 mV/decade. The higher mobility is due to the 2D like electron gas at the interface of AlZnO/ZnO. The stack TFT shows positive threshold voltage and negligible threshold voltage shift under positive bias stress. The presence of Al-O at the interface reduces the oxygen vacancies and improves the bias stability.
| Original language | English |
|---|---|
| Pages (from-to) | 81-84 |
| Number of pages | 4 |
| Journal | Digest of Technical Papers - SID International Symposium |
| Volume | 52 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - 2021 |
| Event | 58th International Symposium on Digest of Technical Papers, ICDT 2021 - Virtual, Online Duration: 17 May 2021 → 21 May 2021 |
Bibliographical note
Publisher Copyright:© 2021 SID.
Keywords
- 2DEG
- AlZnO/ZnO
- Spray pyrolysis
- Stack TFT
- ZnO
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