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Low-Temperature, aqueous-solution-processed zinc tin oxide thin film transistor

  • Jee Ho Park
  • , Won Jin Choi
  • , Jin Young Oh
  • , Soo Sang Chae
  • , Woo Soon Jang
  • , Se Jong Lee
  • , Kie Moon Song
  • , Hong Koo Baik

Research output: Contribution to journalArticlepeer-review

12 Citations (Scopus)

Abstract

We fabricate solution-processed zinc tin oxide (ZTO) thin-film transistors (TFTs). The solution used is prepared by precipitating metal hydroxide using NaOH and dissolving it using NH4OH. The X-ray diffraction (XRD) data of the spin-coated ZTO film demonstrates an amorphous phase, and the atomic force microscopy (AFM) image shows a smooth surface. The device performance of solution-processed TFTs was analyzed as a function of annealing temperature. The fabricated TFTs were operated in the enhancement mode, and exhibited a carrier mobility of 3.03 cm2 V-1 s-1, a threshold voltage of 10.2 V, an on/off current ratio of 1.23 × 107, a subthreshold slope of 0.78 V/decade, and high transparency (with ∼ransmittance) at a low annealing temperature of 300 °C.

Original languageEnglish
Article number070201
JournalJapanese Journal of Applied Physics
Volume50
Issue number7 PART 1
DOIs
Publication statusPublished - Jul 2011

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