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Low-Temperature Process Compatibility for the Oxide Thin Film Transistors Using In-Ga-Zn-O Active Channels Prepared by Atomic-Layer Deposition at 150°C

  • So Jung Yoon
  • , Seung Bo Ko
  • , Nak Jin Seong
  • , Kyujeong Choi
  • , Woong Chul Shin
  • , Sung Min Yoon

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Citation (Scopus)

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