Meso-moiré fringe observation of nano-particle structures by electron Moiré method

Satoshi Kishimoto, Yusuke Yamauchi

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

A new method to measure the spacing and direction in the ordered assembled nanoparticles by using the electron Moiré fringes has been developed. In this method an assembled nanoparticle array can be consider as a model grid. When the electron beam was irradiated on the top of the nanoparticles, the amount of secondary electrons per primary electron is quite large. On the other hand, when the electron beam was irradiated on the valley among the neighboring nanoparticles, the amount of secondary electrons per primary electron is smaller. The difference of the generated secondary electrons per a primary electron fabricate periodical bright and dark pattern, which is the electron mesomoiré fringes. Using this method, the spacing and orientation of the assembled nanoparticle array was measured.

Original languageEnglish
Title of host publicationFourth International Conference on Experimental Mechanics
DOIs
Publication statusPublished - 2010
Event4th International Conference on Experimental Mechanics - Singapore, Singapore
Duration: 18 Nov 200920 Nov 2009

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume7522
ISSN (Print)0277-786X

Conference

Conference4th International Conference on Experimental Mechanics
Country/TerritorySingapore
CitySingapore
Period18/11/0920/11/09

Keywords

  • Assembled nanoparticle array
  • Electron Moiré method
  • Silica nanoparticle
  • Spacing measurement

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