TY - GEN
T1 - Micromechanical active amplifiers using the mechanical resonance modulated by variable stiffness springs
AU - Heo, Yun Jung
AU - Lee, Won Chul
AU - Cho, Young Ho
N1 - Copyright:
Copyright 2008 Elsevier B.V., All rights reserved.
PY - 2007
Y1 - 2007
N2 - We present micromechanical active amplifiers using carrier motion in the mechanical resonance, thereby performing the amplification of displacement, force, and energy. The carrier motion is modulated by variable stiffness springs whose stiffness change is proportional to input motion. We design, fabricate, and test two types of the amplifiers A and B, including two different variable stiffness springs A and B, which are designed to increase output stiffness variation and output-to-input stiffness ratio, respectively. The displacement gain of amplifier A is 5.62, which is 2.15 times larger than that of the amplifier B. The force gain of the amplifier B is 10.0, which is 1.26 times larger than that of the amplifier A. We experimentally verify that the present devices are able to amplify both displacement and force simultaneously, showing potential applications of high-sensitive sensing and high- force/long-range actuation.
AB - We present micromechanical active amplifiers using carrier motion in the mechanical resonance, thereby performing the amplification of displacement, force, and energy. The carrier motion is modulated by variable stiffness springs whose stiffness change is proportional to input motion. We design, fabricate, and test two types of the amplifiers A and B, including two different variable stiffness springs A and B, which are designed to increase output stiffness variation and output-to-input stiffness ratio, respectively. The displacement gain of amplifier A is 5.62, which is 2.15 times larger than that of the amplifier B. The force gain of the amplifier B is 10.0, which is 1.26 times larger than that of the amplifier A. We experimentally verify that the present devices are able to amplify both displacement and force simultaneously, showing potential applications of high-sensitive sensing and high- force/long-range actuation.
UR - http://www.scopus.com/inward/record.url?scp=52249096567&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:52249096567
SN - 1424409519
SN - 9781424409518
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 671
EP - 674
BT - Proceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007
T2 - 20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007
Y2 - 21 January 2007 through 25 January 2007
ER -