Observation of an intermediate state during as-desorption on a (001) inp surface

In-situ monitoring of As-desorption from the (001) InP surface by surface photoabsorption (SPA) was performed for metal-organic chemical vapor deposition. At 470 °C, the SPA signal along the [110] direction was similar to that of Kobayashi et al. However, the signal along the [110] direction showed significantly different results. To understand the chemical states of the surface, we investigated the SPA spectra for stable each state. At a higher temperature of 570 °C, we clearly observed a metastable state after the AsH₃ was turned off. This observation shows that the previous criterion for measuring the amount of As/P exchange reactions and previous the identification of the In-stabilized surface may not necessarily be correct.