Optical properties of bismuth niobate thin films studied by spectroscopic ellipsometry

Y. J. Kang; T. H. Ghong; Y. W. Jung; J. S. Byun; S. Kim; Y. D. Kim; T. G. Seong; K. H. Cho; S. Nahm

doi:10.1016/j.tsf.2010.01.053

Optical properties of bismuth niobate thin films studied by spectroscopic ellipsometry

Y. J. Kang, T. H. Ghong, Y. W. Jung, J. S. Byun, S. Kim, Y. D. Kim, T. G. Seong, K. H. Cho, S. Nahm

Research output: Contribution to journal › Article › peer-review

6 Citations (Scopus)

Abstract

We performed optical analysis of bismuth niobate thin films using spectroscopic ellipsometry (SE). The films were grown on Pt/Ti/SiO ₂/Si substrates with pulsed laser deposition. Six films were prepared using various deposition temperatures and thermal-annealing times. The room-temperature SE spectra of these films were measured by a rotating-analyzer ellipsometer from 1.12 to 6.52 eV at incidence angles of 50, 55, 60, 65, and 70°. The resulting refractive indices and extinction coefficients show significant changes with deposition temperature and thermal annealing.

Original language	English
Pages (from-to)	6526-6530
Number of pages	5
Journal	Thin Solid Films
Volume	518
Issue number	22
DOIs	https://doi.org/10.1016/j.tsf.2010.01.053
Publication status	Published - 1 Sept 2010

Keywords

Busmuth neobate
Ellipsometry
Optical property

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10.1016/j.tsf.2010.01.053

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@article{18e01ee974114192be69a084047431e4,

title = "Optical properties of bismuth niobate thin films studied by spectroscopic ellipsometry",

abstract = "We performed optical analysis of bismuth niobate thin films using spectroscopic ellipsometry (SE). The films were grown on Pt/Ti/SiO 2/Si substrates with pulsed laser deposition. Six films were prepared using various deposition temperatures and thermal-annealing times. The room-temperature SE spectra of these films were measured by a rotating-analyzer ellipsometer from 1.12 to 6.52 eV at incidence angles of 50, 55, 60, 65, and 70°. The resulting refractive indices and extinction coefficients show significant changes with deposition temperature and thermal annealing.",

keywords = "Busmuth neobate, Ellipsometry, Optical property",

author = "Kang, {Y. J.} and Ghong, {T. H.} and Jung, {Y. W.} and Byun, {J. S.} and S. Kim and Kim, {Y. D.} and Seong, {T. G.} and Cho, {K. H.} and S. Nahm",

year = "2010",

month = sep,

day = "1",

doi = "10.1016/j.tsf.2010.01.053",

language = "English",

volume = "518",

pages = "6526--6530",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier B.V.",

number = "22",

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TY - JOUR

T1 - Optical properties of bismuth niobate thin films studied by spectroscopic ellipsometry

AU - Kang, Y. J.

AU - Ghong, T. H.

AU - Jung, Y. W.

AU - Byun, J. S.

AU - Kim, S.

AU - Kim, Y. D.

AU - Seong, T. G.

AU - Cho, K. H.

AU - Nahm, S.

PY - 2010/9/1

Y1 - 2010/9/1

N2 - We performed optical analysis of bismuth niobate thin films using spectroscopic ellipsometry (SE). The films were grown on Pt/Ti/SiO 2/Si substrates with pulsed laser deposition. Six films were prepared using various deposition temperatures and thermal-annealing times. The room-temperature SE spectra of these films were measured by a rotating-analyzer ellipsometer from 1.12 to 6.52 eV at incidence angles of 50, 55, 60, 65, and 70°. The resulting refractive indices and extinction coefficients show significant changes with deposition temperature and thermal annealing.

AB - We performed optical analysis of bismuth niobate thin films using spectroscopic ellipsometry (SE). The films were grown on Pt/Ti/SiO 2/Si substrates with pulsed laser deposition. Six films were prepared using various deposition temperatures and thermal-annealing times. The room-temperature SE spectra of these films were measured by a rotating-analyzer ellipsometer from 1.12 to 6.52 eV at incidence angles of 50, 55, 60, 65, and 70°. The resulting refractive indices and extinction coefficients show significant changes with deposition temperature and thermal annealing.

KW - Busmuth neobate

KW - Ellipsometry

KW - Optical property

UR - http://www.scopus.com/inward/record.url?scp=77956062850&partnerID=8YFLogxK

U2 - 10.1016/j.tsf.2010.01.053

DO - 10.1016/j.tsf.2010.01.053

M3 - Article

AN - SCOPUS:77956062850

SN - 0040-6090

VL - 518

SP - 6526

EP - 6530

JO - Thin Solid Films

JF - Thin Solid Films

IS - 22

ER -

Optical properties of bismuth niobate thin films studied by spectroscopic ellipsometry

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Keywords

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