Optimization of Al2O3/ZrO2 nanolaminate structure on the plastic substrates for the flexible display

Ji Hae Eun; Young Seok Paek; Hyun Gi Kim; Man Soo Kim; Young Chul Kim; Sung Soo Kim

Optimization of Al₂O₃/ZrO₂ nanolaminate structure on the plastic substrates for the flexible display

Ji Hae Eun
, Young Seok Paek
, Hyun Gi Kim
, Man Soo Kim
, Young Chul Kim
, Sung Soo Kim

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

Al₂O₃/ZrO₂ nanolaminate was deposited on plastic substrates by low frequency plasma-enhanced atomic layer deposition (PEALD) process. In order to enhance the barrier properties of polymeric substrates, the layer structure was optimized with various process conditions.

Original language	English
Title of host publication	22nd International Display Workshops, IDW 2015
Publisher	International Display Workshops
Pages	1765-1766
Number of pages	2
ISBN (Electronic)	9781510845503
Publication status	Published - 2015
Event	22nd International Display Workshops, IDW 2015 - Otsu, Japan Duration: 9 Dec 2015 → 11 Dec 2015

Publication series

Name	Proceedings of the International Display Workshops
Volume	3
ISSN (Print)	1883-2490

Conference

Conference	22nd International Display Workshops, IDW 2015
Country/Territory	Japan
City	Otsu
Period	9/12/15 → 11/12/15

Bibliographical note

Publisher Copyright:
© 2015 Proceedings of the International Display Workshops. All rights reserved.

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 3 Good Health and Well-being

Keywords

Barrier property
Flexible display
Nanolaminate
PEALD
Polymeric substrate
WVTR

Cite this

@inproceedings{b208e224794f4cbc87afe80612d22e4a,

title = "Optimization of Al2O3/ZrO2 nanolaminate structure on the plastic substrates for the flexible display",

abstract = "Al2O3/ZrO2 nanolaminate was deposited on plastic substrates by low frequency plasma-enhanced atomic layer deposition (PEALD) process. In order to enhance the barrier properties of polymeric substrates, the layer structure was optimized with various process conditions.",

keywords = "Barrier property, Flexible display, Nanolaminate, PEALD, Polymeric substrate, WVTR",

author = "Eun, \{Ji Hae\} and Paek, \{Young Seok\} and Kim, \{Hyun Gi\} and Kim, \{Man Soo\} and Kim, \{Young Chul\} and Kim, \{Sung Soo\}",

note = "Publisher Copyright: {\textcopyright} 2015 Proceedings of the International Display Workshops. All rights reserved.; 22nd International Display Workshops, IDW 2015 ; Conference date: 09-12-2015 Through 11-12-2015",

year = "2015",

language = "English",

series = "Proceedings of the International Display Workshops",

publisher = "International Display Workshops",

pages = "1765--1766",

booktitle = "22nd International Display Workshops, IDW 2015",

}

Eun, JH, Paek, YS, Kim, HG, Kim, MS, Kim, YC & Kim, SS 2015, Optimization of Al₂O₃/ZrO₂ nanolaminate structure on the plastic substrates for the flexible display. in 22nd International Display Workshops, IDW 2015. Proceedings of the International Display Workshops, vol. 3, International Display Workshops, pp. 1765-1766, 22nd International Display Workshops, IDW 2015, Otsu, Japan, 9/12/15.

Optimization of Al₂O₃/ZrO₂ nanolaminate structure on the plastic substrates for the flexible display. / Eun, Ji Hae; Paek, Young Seok; Kim, Hyun Gi et al.
22nd International Display Workshops, IDW 2015. International Display Workshops, 2015. p. 1765-1766 (Proceedings of the International Display Workshops; Vol. 3).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Optimization of Al2O3/ZrO2 nanolaminate structure on the plastic substrates for the flexible display

AU - Eun, Ji Hae

AU - Paek, Young Seok

AU - Kim, Hyun Gi

AU - Kim, Man Soo

AU - Kim, Young Chul

AU - Kim, Sung Soo

PY - 2015

Y1 - 2015

N2 - Al2O3/ZrO2 nanolaminate was deposited on plastic substrates by low frequency plasma-enhanced atomic layer deposition (PEALD) process. In order to enhance the barrier properties of polymeric substrates, the layer structure was optimized with various process conditions.

AB - Al2O3/ZrO2 nanolaminate was deposited on plastic substrates by low frequency plasma-enhanced atomic layer deposition (PEALD) process. In order to enhance the barrier properties of polymeric substrates, the layer structure was optimized with various process conditions.

KW - Barrier property

KW - Flexible display

KW - Nanolaminate

KW - PEALD

KW - Polymeric substrate

KW - WVTR

UR - https://www.scopus.com/pages/publications/85056462700

M3 - Conference contribution

AN - SCOPUS:85056462700

T3 - Proceedings of the International Display Workshops

SP - 1765

EP - 1766

BT - 22nd International Display Workshops, IDW 2015

PB - International Display Workshops

T2 - 22nd International Display Workshops, IDW 2015

Y2 - 9 December 2015 through 11 December 2015

ER -