Optimization of High-performance Single Island Carbon Nanotube Electron Beam (C-Beam) for Microscopy Application

Ravindra Patil; Aniket Karande; Ketan Bhotkar; Kyu Chang Park

doi:10.1109/IVNC63480.2024.10652530

Optimization of High-performance Single Island Carbon Nanotube Electron Beam (C-Beam) for Microscopy Application

Ravindra Patil, Aniket Karande, Ketan Bhotkar, Kyu Chang Park

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

This study successfully built a carbon nanotube (VACNT) cold cathode (C-beam) as a potential electron source for high-resolution scanning electron microscopes. The C-beam achieved a stable emission current with high transmission and a narrow beam divergence angle. These findings suggest VACNTC-beams hold promise for next-generation microscopy techniques.

Original language	English
Title of host publication	2024 37th International Vacuum Nanoelectronics Conference, IVNC 2024
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9798350379754
DOIs	https://doi.org/10.1109/IVNC63480.2024.10652530
Publication status	Published - 2024
Event	37th International Vacuum Nanoelectronics Conference, IVNC 2024 - Brno, Czech Republic Duration: 15 Jul 2024 → 19 Jul 2024

Publication series

Name	2024 37th International Vacuum Nanoelectronics Conference, IVNC 2024

Conference

Conference	37th International Vacuum Nanoelectronics Conference, IVNC 2024
Country/Territory	Czech Republic
City	Brno
Period	15/07/24 → 19/07/24

Bibliographical note

Publisher Copyright:
© 2024 IEEE.

Keywords

C-beam
Carbon nanotube
DC-PECVD
Divergence angle
Phosphor screen imaging

Access to Document

10.1109/IVNC63480.2024.10652530

Cite this

Patil, R., Karande, A., Bhotkar, K., & Park, K. C. (2024). Optimization of High-performance Single Island Carbon Nanotube Electron Beam (C-Beam) for Microscopy Application. In 2024 37th International Vacuum Nanoelectronics Conference, IVNC 2024 (2024 37th International Vacuum Nanoelectronics Conference, IVNC 2024). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/IVNC63480.2024.10652530

Patil, Ravindra ; Karande, Aniket ; Bhotkar, Ketan et al. / Optimization of High-performance Single Island Carbon Nanotube Electron Beam (C-Beam) for Microscopy Application. 2024 37th International Vacuum Nanoelectronics Conference, IVNC 2024. Institute of Electrical and Electronics Engineers Inc., 2024. (2024 37th International Vacuum Nanoelectronics Conference, IVNC 2024).

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abstract = "This study successfully built a carbon nanotube (VACNT) cold cathode (C-beam) as a potential electron source for high-resolution scanning electron microscopes. The C-beam achieved a stable emission current with high transmission and a narrow beam divergence angle. These findings suggest VACNTC-beams hold promise for next-generation microscopy techniques.",

keywords = "C-beam, Carbon nanotube, DC-PECVD, Divergence angle, Phosphor screen imaging",

author = "Ravindra Patil and Aniket Karande and Ketan Bhotkar and Park, {Kyu Chang}",

note = "Publisher Copyright: {\textcopyright} 2024 IEEE.; 37th International Vacuum Nanoelectronics Conference, IVNC 2024 ; Conference date: 15-07-2024 Through 19-07-2024",

year = "2024",

doi = "10.1109/IVNC63480.2024.10652530",

language = "English",

series = "2024 37th International Vacuum Nanoelectronics Conference, IVNC 2024",

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Patil, R, Karande, A, Bhotkar, K & Park, KC 2024, Optimization of High-performance Single Island Carbon Nanotube Electron Beam (C-Beam) for Microscopy Application. in 2024 37th International Vacuum Nanoelectronics Conference, IVNC 2024. 2024 37th International Vacuum Nanoelectronics Conference, IVNC 2024, Institute of Electrical and Electronics Engineers Inc., 37th International Vacuum Nanoelectronics Conference, IVNC 2024, Brno, Czech Republic, 15/07/24. https://doi.org/10.1109/IVNC63480.2024.10652530

Optimization of High-performance Single Island Carbon Nanotube Electron Beam (C-Beam) for Microscopy Application. / Patil, Ravindra; Karande, Aniket; Bhotkar, Ketan et al.
2024 37th International Vacuum Nanoelectronics Conference, IVNC 2024. Institute of Electrical and Electronics Engineers Inc., 2024. (2024 37th International Vacuum Nanoelectronics Conference, IVNC 2024).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AU - Park, Kyu Chang

PY - 2024

Y1 - 2024

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AB - This study successfully built a carbon nanotube (VACNT) cold cathode (C-beam) as a potential electron source for high-resolution scanning electron microscopes. The C-beam achieved a stable emission current with high transmission and a narrow beam divergence angle. These findings suggest VACNTC-beams hold promise for next-generation microscopy techniques.

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KW - Divergence angle

KW - Phosphor screen imaging

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BT - 2024 37th International Vacuum Nanoelectronics Conference, IVNC 2024

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Patil R, Karande A, Bhotkar K, Park KC. Optimization of High-performance Single Island Carbon Nanotube Electron Beam (C-Beam) for Microscopy Application. In 2024 37th International Vacuum Nanoelectronics Conference, IVNC 2024. Institute of Electrical and Electronics Engineers Inc. 2024. (2024 37th International Vacuum Nanoelectronics Conference, IVNC 2024). doi: 10.1109/IVNC63480.2024.10652530

Optimization of High-performance Single Island Carbon Nanotube Electron Beam (C-Beam) for Microscopy Application

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