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Optofluidic maskless lithography system for real-time synthesis of photopolymerized microstructures in microfluidic channels

  • Su Eun Chung
  • , Wook Park
  • , Hyunsung Park
  • , Kyoungsik Yu
  • , Namkyoo Park
  • , Sunghoon Kwon

Research output: Contribution to journalArticlepeer-review

210 Citations (Scopus)

Abstract

The authors propose an optofluidic maskless lithography technique that can dynamically synthesize free-floating polymeric microstructures inside microfluidic channels by selectively polymerizing photocurable resin with high-speed two-dimensional spatial light modulators. The combination of programable optical projection and microfluidic devices allows one to precisely control the timing and location of the photopolymerization process for microstructure fabrication. Real-time generation of microparticles with various shapes, sizes, ordering, and material contents are experimentally demonstrated. Long polymeric structures of which size is not limited by the exposure field of view can also be fabricated.

Original languageEnglish
Article number041106
JournalApplied Physics Letters
Volume91
Issue number4
DOIs
Publication statusPublished - 2007

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