Abstract
Sn was employed in Ge2Sb2Te5 to accelerate operation speed of phase change random access memory (PRAM). Crystallized Sn-doped Ge2Sb2Te5 showed face centered cubic (fee) or hexagonal close packed (hcp) structures upon heat treatment, which was similar to that of Ge2Sb2Te5. However, Sn doping increased the phase transformation temperature to hcp of Ge 2Sb2Te2. 17 at. % Sn-doped Ge 2Sb2Te5 had an accelerated crystallization under laser irradiation and moreover, showed decreased operation time of PRAM compared to that of Ge2Sb2Te5. In addition, 17 at. % Sn-doped Ge2Sb2Te5 showed stable and reversible device performance.
| Original language | English |
|---|---|
| Pages (from-to) | L1273-L1276 |
| Journal | Japanese Journal of Applied Physics |
| Volume | 45 |
| Issue number | 46-50 |
| DOIs | |
| Publication status | Published - Dec 2006 |
Keywords
- Electrical properties of amorphous semiconductor
- Laser-induced crystallization
- PRAM
- Phase change material
- Sn-doped GeSbTe
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