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Phase transition characteristics and device performance of Sn-doped Ge 2Sb2Te5 in phase change random access memory

  • Tae Jin Park
  • , Dae Hyun Kim
  • , Sung Min Yoon
  • , Kyu Jeong Choi
  • , Nam Yeal Lee
  • , Byoung Gon Yu
  • , Se Young Choi

Research output: Contribution to journalArticlepeer-review

19 Citations (Scopus)

Abstract

Sn was employed in Ge2Sb2Te5 to accelerate operation speed of phase change random access memory (PRAM). Crystallized Sn-doped Ge2Sb2Te5 showed face centered cubic (fee) or hexagonal close packed (hcp) structures upon heat treatment, which was similar to that of Ge2Sb2Te5. However, Sn doping increased the phase transformation temperature to hcp of Ge 2Sb2Te2. 17 at. % Sn-doped Ge 2Sb2Te5 had an accelerated crystallization under laser irradiation and moreover, showed decreased operation time of PRAM compared to that of Ge2Sb2Te5. In addition, 17 at. % Sn-doped Ge2Sb2Te5 showed stable and reversible device performance.

Original languageEnglish
Pages (from-to)L1273-L1276
JournalJapanese Journal of Applied Physics
Volume45
Issue number46-50
DOIs
Publication statusPublished - Dec 2006

Keywords

  • Electrical properties of amorphous semiconductor
  • Laser-induced crystallization
  • PRAM
  • Phase change material
  • Sn-doped GeSbTe

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