Abstract
We present an in situ investigation of As-desorption from the (001) InP surface using surface photoabsorption (SPA). At 470°C, we observed that the SPA signals along [110] remained unchanged even after the AsH3 supply was turned off, while the SPA signal along [110] showed a sharp increase as reported previously. We also measured SPA spectra at several stable states and found that the surface after AsH3 was turned off could not reach that of an In-stabilized surface. We interpret these results in terms of As-desorption occurring possibly as a two-step process, in contrast to P-desorption of a one step process.
Original language | English |
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Pages (from-to) | L980-L982 |
Journal | Japanese Journal of Applied Physics |
Volume | 40 |
Issue number | 9 A/B |
DOIs | |
Publication status | Published - 15 Sept 2001 |
Keywords
- As-desorption
- InP
- MOCVD
- P-desorption
- Surface photoabsorption