Precision auto-alignment for incident angle of an ellipsometer using specimen stage

Sunglim Park; Dae Gab Gweon; Young Dong Kim

doi:10.1016/j.tsf.2003.12.047

Precision auto-alignment for incident angle of an ellipsometer using specimen stage

Sunglim Park, Dae Gab Gweon, Young Dong Kim

Research output: Contribution to journal › Conference article › peer-review

Abstract

We present a new two-step auto-alignment algorithm for the specimen stage of an ellipsometer. Correction of errors in tilt angle and position of the specimen stage can be performed by locating the reflected light spot at the center of the detector at two different angles of incidence or at two different orientations. The current method needs only one additional laser diode and one photo diode. Model simulation showed that the two-step algorithm works well. This method is very simple and easy and has low cost.

Original language	English
Pages (from-to)	72-77
Number of pages	6
Journal	Thin Solid Films
Volume	455-456
DOIs	https://doi.org/10.1016/j.tsf.2003.12.047
Publication status	Published - 1 May 2004
Event	The 3rd International Conference on Spectroscopic Ellipsometry - Vienna, Austria Duration: 6 Jul 2003 → 11 Jul 2003

Bibliographical note

Funding Information:
This work was supported by Korea Science and Engineering Foundation (KOSEF) grant No. R02-2003-000-10074-0 and also by the Quantum Photonic Science Research Center at Hanyang University.

Keywords

Ellipsometer
Incident angle alignment

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10.1016/j.tsf.2003.12.047

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title = "Precision auto-alignment for incident angle of an ellipsometer using specimen stage",

abstract = "We present a new two-step auto-alignment algorithm for the specimen stage of an ellipsometer. Correction of errors in tilt angle and position of the specimen stage can be performed by locating the reflected light spot at the center of the detector at two different angles of incidence or at two different orientations. The current method needs only one additional laser diode and one photo diode. Model simulation showed that the two-step algorithm works well. This method is very simple and easy and has low cost.",

keywords = "Ellipsometer, Incident angle alignment",

author = "Sunglim Park and Gweon, {Dae Gab} and Kim, {Young Dong}",

note = "Funding Information: This work was supported by Korea Science and Engineering Foundation (KOSEF) grant No. R02-2003-000-10074-0 and also by the Quantum Photonic Science Research Center at Hanyang University.; The 3rd International Conference on Spectroscopic Ellipsometry ; Conference date: 06-07-2003 Through 11-07-2003",

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doi = "10.1016/j.tsf.2003.12.047",

language = "English",

volume = "455-456",

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journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier B.V.",

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TY - JOUR

T1 - Precision auto-alignment for incident angle of an ellipsometer using specimen stage

AU - Park, Sunglim

AU - Gweon, Dae Gab

AU - Kim, Young Dong

N1 - Funding Information: This work was supported by Korea Science and Engineering Foundation (KOSEF) grant No. R02-2003-000-10074-0 and also by the Quantum Photonic Science Research Center at Hanyang University.

PY - 2004/5/1

Y1 - 2004/5/1

N2 - We present a new two-step auto-alignment algorithm for the specimen stage of an ellipsometer. Correction of errors in tilt angle and position of the specimen stage can be performed by locating the reflected light spot at the center of the detector at two different angles of incidence or at two different orientations. The current method needs only one additional laser diode and one photo diode. Model simulation showed that the two-step algorithm works well. This method is very simple and easy and has low cost.

AB - We present a new two-step auto-alignment algorithm for the specimen stage of an ellipsometer. Correction of errors in tilt angle and position of the specimen stage can be performed by locating the reflected light spot at the center of the detector at two different angles of incidence or at two different orientations. The current method needs only one additional laser diode and one photo diode. Model simulation showed that the two-step algorithm works well. This method is very simple and easy and has low cost.

KW - Ellipsometer

KW - Incident angle alignment

UR - http://www.scopus.com/inward/record.url?scp=17144461227&partnerID=8YFLogxK

U2 - 10.1016/j.tsf.2003.12.047

DO - 10.1016/j.tsf.2003.12.047

M3 - Conference article

AN - SCOPUS:17144461227

SN - 0040-6090

VL - 455-456

SP - 72

EP - 77

JO - Thin Solid Films

JF - Thin Solid Films

T2 - The 3rd International Conference on Spectroscopic Ellipsometry

Y2 - 6 July 2003 through 11 July 2003

ER -

Precision auto-alignment for incident angle of an ellipsometer using specimen stage

Abstract

Bibliographical note

Keywords

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