@inproceedings{ed6c310f47a34e2095b2531f8e02076b,
title = "Scaling-down effects on the electrical performance of top-contact pentacene TETs",
abstract = "Top-contact pentacene TFTs were successfully scaled down to the level of Lc=1.8 ,μm by using silicon nitride membrane shadow mask. Pentacene TFT with the grain size of a few micrometer showed high off-current even in the depletion mode when Lc of pentacene TFT was reduced to the length less than 10 ,um. High mobility of 0.2 cm2/Vsec and good on-off current ratio more than 107 were obtained by using a two step deposition (TSD) technique even for the pentacene TFT with Lc=1.8 μm. The grain size plays a key role in determining the off-current level of top-contact pentacene TFTs with Lc less than 10 μm.",
author = "Lee, {Jong Duk} and Jin, {Sung Hun} and Jung, {Keum Dong} and Park, {Byung Gook}",
year = "2004",
language = "English",
isbn = "0780386582",
series = "Proceedings ICSE 2004 - 2004 IEEE International Conference on Semiconductor Electronics",
pages = "668--672",
booktitle = "2004 IEEE International Conference on Semiconductor Electronics, ICSE 2004",
note = "2004 IEEE International Conference on Semiconductor Electronics, ICSE 2004 ; Conference date: 04-12-2004 Through 09-12-2004",
}