Self-heating effect of low-temperature polycrystalline silicon thin film transistor considering grain boundary protrusion

Abu Bakar Siddik, Md Hasnat Rabbi, Sangyeon Bae, Mohammad Masum Billah, Jin Jang

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

A proper estimation of the self-heating effect is crucial to ensure the reliable performance of high mobility transistors. We perform Silvaco TCAD based thermal distribution modeling in grain, grain boundary (GB) and protrusion of excimer laser annealed (ELA) low-temperature polycrystalline (LTPS) silicon thin-film transistors (TFTs).

Original languageEnglish
Title of host publication26th International Display Workshops, IDW 2019
PublisherInternational Display Workshops
Pages581-583
Number of pages3
ISBN (Electronic)9781713806301
Publication statusPublished - 2019
Event26th International Display Workshops, IDW 2019 - Sapporo, Japan
Duration: 27 Nov 201929 Nov 2019

Publication series

NameProceedings of the International Display Workshops
Volume2
ISSN (Print)1883-2490

Conference

Conference26th International Display Workshops, IDW 2019
Country/TerritoryJapan
CitySapporo
Period27/11/1929/11/19

Bibliographical note

Publisher Copyright:
© 2019 ITE and SID.

Keywords

  • Grain boundary protrusion
  • LTPS TFT
  • Self-heating
  • Technology computer-aided design (TCAD)

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