Abstract
A proper estimation of the self-heating effect is crucial to ensure the reliable performance of high mobility transistors. We perform Silvaco TCAD based thermal distribution modeling in grain, grain boundary (GB) and protrusion of excimer laser annealed (ELA) low-temperature polycrystalline (LTPS) silicon thin-film transistors (TFTs).
Original language | English |
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Title of host publication | 26th International Display Workshops, IDW 2019 |
Publisher | International Display Workshops |
Pages | 581-583 |
Number of pages | 3 |
ISBN (Electronic) | 9781713806301 |
Publication status | Published - 2019 |
Event | 26th International Display Workshops, IDW 2019 - Sapporo, Japan Duration: 27 Nov 2019 → 29 Nov 2019 |
Publication series
Name | Proceedings of the International Display Workshops |
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Volume | 2 |
ISSN (Print) | 1883-2490 |
Conference
Conference | 26th International Display Workshops, IDW 2019 |
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Country/Territory | Japan |
City | Sapporo |
Period | 27/11/19 → 29/11/19 |
Bibliographical note
Publisher Copyright:© 2019 ITE and SID.
Keywords
- Grain boundary protrusion
- LTPS TFT
- Self-heating
- Technology computer-aided design (TCAD)