Abstract
Synchrotron-radiation x-ray photoelectron spectroscopy (XPS) has been used to analyze size-dependent Si 2p core-level spectra of Si nanocrystals (NCs) embedded in Si O2. The Si0 and suboxide XPS peaks of Si NCs shift to higher binding energies with decreasing NC size, which is based on the resolved spectra fitted by using Gaussian-Lorentzian lines for the Si oxidation states. It is also found that the shell region around Si NC bordered by Si O2 consists of the three Si suboxide states, Si1+, Si2+, and Si3+, whose densities are also strongly dependent on NC size. These results suggest that the analysis of the Si 2p core-level shift by XPS is useful for characterizing the size effect of Si NC at the Si NCSi O2 interfaces.
Original language | English |
---|---|
Article number | 103113 |
Journal | Applied Physics Letters |
Volume | 91 |
Issue number | 10 |
DOIs | |
Publication status | Published - 2007 |
Bibliographical note
Funding Information:This work was supported by the National Research Program for the 0.1 Terabit Non-Volatile Memory Development sponsored by Korea Ministry of Science and Technology and was performed using the high-voltage electron microscope ( 1.25 MV , JEM-ARM1300S, JEOL, Japan) installed at Korea Basic Science Institute.