Abstract
High-resolution electron microscopy requires an electron source with high brightness and resolution. We simulated and fabricated the carbon nanotube (CNT) cold cathode with high resolution. For the simulation, we used SOURCE 2D simulator and fabricated self-focused CNT based electron beam. The beam shows micron scale resolution with optimized self-focused CNT beam design. The beam spot size depends on the various parameters, such as depth, width and driving conditions.
| Original language | English |
|---|---|
| Title of host publication | 26th International Display Workshops, IDW 2019 |
| Publisher | International Display Workshops |
| Pages | 1434-1436 |
| Number of pages | 3 |
| ISBN (Electronic) | 9781713806301 |
| Publication status | Published - 2019 |
| Event | 26th International Display Workshops, IDW 2019 - Sapporo, Japan Duration: 27 Nov 2019 → 29 Nov 2019 |
Publication series
| Name | Proceedings of the International Display Workshops |
|---|---|
| Volume | 3 |
| ISSN (Print) | 1883-2490 |
Conference
| Conference | 26th International Display Workshops, IDW 2019 |
|---|---|
| Country/Territory | Japan |
| City | Sapporo |
| Period | 27/11/19 → 29/11/19 |
Bibliographical note
Publisher Copyright:© 2019 ITE and SID
Keywords
- Beam divergence
- Carbon nanotube (CNT)
- Electron beam
- High resolution
Fingerprint
Dive into the research topics of 'SOURCE 2D simulation for high resolution carbon nanotube cold cathode fabrication'. Together they form a unique fingerprint.Cite this
- APA
- Author
- BIBTEX
- Harvard
- Standard
- RIS
- Vancouver