Abstract
GaN films were grown at 550 °C and subsequently at 1040 °C on sapphire (10 1- 2) (r -plane) substrates by using hydride vapor phase epitaxy with different layer thicknesses. As the thickness of a low-temperature-grown GaN layer was increased, a preferred orientation of GaN grown at 1040 °C changed from [11 2̄0] to [0001]. A detailed atomistic model reveals that this spontaneous transition in preferred orientation is due to the formation of inversion domain boundaries and stacking faults. This result has a significant implication that tailoring film characteristics in terms of controllability of preferred orientation may be possible independent of substrate orientation.
| Original language | English |
|---|---|
| Article number | 102103 |
| Journal | Applied Physics Letters |
| Volume | 94 |
| Issue number | 10 |
| DOIs | |
| Publication status | Published - 2009 |
Bibliographical note
Funding Information:H.J.L. would like to thank the Japan Society for the Promotion of Science (JSPS) for providing financial support in the form of a JSPS Research Fellowship for Young Scientists. C.K. was supported in part by the Seoul Research and Business Development Program under Grant No. 10583.
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