Strong enhancement of near-band-edge photoluminescence from ZnO by assembling ZnO/SiOx heterostructures

Sung Kim, Chang Oh Kim, Hyoung Taek Oh, Suk Ho Choi

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5 Citations (Scopus)

Abstract

Double layers of 100 nm ZnO/300 nm SiOx have been grown on Si (1 0 0) by radio-frequency sputtering and ion beam sputtering deposition, respectively. The oxygen content (x) of SiOx is varied from 0.8 to 1.8, as controlled and determined by x-ray photoelectron spectroscopy analysis. Optical and structural properties of the ZnO/SiOx heterostructures annealed at 900 °C for 20 min are studied by photoluminescence (PL), high-resolution transmission electron microscopy and near-edge x-ray absorption fine structure (NEXAFS) analysis. The near-band-edge PL spectrum of the heterostructures is almost 4 times enhanced at x = 1.0, compared with that of ZnO single layer, and its peak energy, intensity and shape strongly depend on the x value. These results are attributed to the band bending at the ZnO/SiOx interface, as confirmed by the NEXAFS analysis.

Original languageEnglish
Article number235403
JournalJournal Physics D: Applied Physics
Volume41
Issue number23
DOIs
Publication statusPublished - 2008

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