TY - GEN
T1 - Study on parasitic and channel resistance of poly-silicon thin-film transistors by metal-induced crystallization
AU - Saxena, Saurabh
AU - Cheon, Jun Hyuk
AU - Kennedy, G. P.
AU - Bae, Jung Ho
AU - Jang, Jin
PY - 2007
Y1 - 2007
N2 - We studied the temperature dependent transfer characteristics of the poly-Si TFTs fabricated by metal-induced crystallization through a cap (MICC) to evaluate the temperature dependent parasitic and channel resistances. For p-channel MICC TFTs, the channel width 12 μm was kept constant and channel lengths were varied as 6, 12, and 24 μm respectively. The MICC p-channel TFTs studied in the present work showed maximum field-effect mobility, threshold voltage and gate swing of 53 cm2/Vs, -4.4V and 0.8 V/dec, for W/L =12/6, 71 cm2/Vs, -5.3V and 0.9 V/dec for W/L = 12/12 and 113cm 2/Vs, -7V and 1 V/dec for W/L = 12/24 respectively. It is found that the parasitic and channel resistance decrease with increasing the temperature.
AB - We studied the temperature dependent transfer characteristics of the poly-Si TFTs fabricated by metal-induced crystallization through a cap (MICC) to evaluate the temperature dependent parasitic and channel resistances. For p-channel MICC TFTs, the channel width 12 μm was kept constant and channel lengths were varied as 6, 12, and 24 μm respectively. The MICC p-channel TFTs studied in the present work showed maximum field-effect mobility, threshold voltage and gate swing of 53 cm2/Vs, -4.4V and 0.8 V/dec, for W/L =12/6, 71 cm2/Vs, -5.3V and 0.9 V/dec for W/L = 12/12 and 113cm 2/Vs, -7V and 1 V/dec for W/L = 12/24 respectively. It is found that the parasitic and channel resistance decrease with increasing the temperature.
UR - https://www.scopus.com/pages/publications/55549100634
M3 - Conference contribution
AN - SCOPUS:55549100634
SN - 9781605603896
T3 - Society for Information Display - 10th Asian Symposium on Information Display 2007, ASID'07
SP - 265
EP - 270
BT - Society for Information Display - 10th Asian Symposium on Information Display 2007, ASID'07
T2 - 10th Asian Symposium on Information Display, ASID'07
Y2 - 2 August 2007 through 3 August 2007
ER -