Surface mapping of 2-D opaque microscopic objects via forward shadow diffraction

Songky Moon; Jeong Bo Shim; Sang Bum Lee; Juhee Yang; Sang Wook Kim; Jai Hyung Lee; Kyungwon An

Surface mapping of 2-D opaque microscopic objects via forward shadow diffraction

Songky Moon
, Jeong Bo Shim
, Sang Bum Lee
, Juhee Yang
, Sang Wook Kim
, Jai Hyung Lee
, Kyungwon An

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

We have found that the angular width between two adjacent local minima on the forward diffraction pattern of an opaque convex object is inversely proportional to the projection width of the object in that diffraction direction. Based on this finding we have developed a nondestructive twodimensional surface mapping technique with a 20-nm resolution.

Original language	English
Title of host publication	Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2007
Publisher	Optical Society of America
ISBN (Print)	1424411742, 9781424411740
Publication status	Published - 2007
Event	Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2007 - Seoul, Korea, Republic of Duration: 26 Aug 2007 → 26 Aug 2007

Publication series

Name	Optics InfoBase Conference Papers
ISSN (Electronic)	2162-2701

Conference

Conference	Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2007
Country/Territory	Korea, Republic of
City	Seoul
Period	26/08/07 → 26/08/07

Cite this

@inproceedings{2e99c14706004a4e87312191c33dc4cb,

title = "Surface mapping of 2-D opaque microscopic objects via forward shadow diffraction",

abstract = "We have found that the angular width between two adjacent local minima on the forward diffraction pattern of an opaque convex object is inversely proportional to the projection width of the object in that diffraction direction. Based on this finding we have developed a nondestructive twodimensional surface mapping technique with a 20-nm resolution.",

author = "Songky Moon and Shim, \{Jeong Bo\} and Lee, \{Sang Bum\} and Juhee Yang and Kim, \{Sang Wook\} and Lee, \{Jai Hyung\} and Kyungwon An",

year = "2007",

language = "English",

isbn = "1424411742",

series = "Optics InfoBase Conference Papers",

publisher = "Optical Society of America",

booktitle = "Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2007",

}

Moon, S, Shim, JB, Lee, SB, Yang, J, Kim, SW, Lee, JH & An, K 2007, Surface mapping of 2-D opaque microscopic objects via forward shadow diffraction. in Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2007. Optics InfoBase Conference Papers, Optical Society of America, Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2007, Seoul, Korea, Republic of, 26/08/07.

Surface mapping of 2-D opaque microscopic objects via forward shadow diffraction. / Moon, Songky; Shim, Jeong Bo; Lee, Sang Bum et al.
Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2007. Optical Society of America, 2007. (Optics InfoBase Conference Papers).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Surface mapping of 2-D opaque microscopic objects via forward shadow diffraction

AU - Moon, Songky

AU - Shim, Jeong Bo

AU - Lee, Sang Bum

AU - Yang, Juhee

AU - Kim, Sang Wook

AU - Lee, Jai Hyung

AU - An, Kyungwon

PY - 2007

Y1 - 2007

N2 - We have found that the angular width between two adjacent local minima on the forward diffraction pattern of an opaque convex object is inversely proportional to the projection width of the object in that diffraction direction. Based on this finding we have developed a nondestructive twodimensional surface mapping technique with a 20-nm resolution.

AB - We have found that the angular width between two adjacent local minima on the forward diffraction pattern of an opaque convex object is inversely proportional to the projection width of the object in that diffraction direction. Based on this finding we have developed a nondestructive twodimensional surface mapping technique with a 20-nm resolution.

UR - https://www.scopus.com/pages/publications/84899115166

M3 - Conference contribution

AN - SCOPUS:84899115166

SN - 1424411742

SN - 9781424411740

T3 - Optics InfoBase Conference Papers

BT - Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2007

PB - Optical Society of America

T2 - Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2007

Y2 - 26 August 2007 through 26 August 2007

ER -

Surface mapping of 2-D opaque microscopic objects via forward shadow diffraction

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