Surface mapping of 2-D opaque microscopic objects via forward shadow diffraction

Songky Moon; Jeong Bo Shim; Sang Bum Lee; Juhee Yang; Sang Wook Kim; Jai Hyung Lee; Kyungwon An

doi:10.1109/CLEOPR.2007.4391662

Surface mapping of 2-D opaque microscopic objects via forward shadow diffraction

Songky Moon
, Jeong Bo Shim
, Sang Bum Lee
, Juhee Yang
, Sang Wook Kim
, Jai Hyung Lee
, Kyungwon An

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

We have found that the angular width between two adjacent local minima on the forward diffraction pattern of an opaque convex object is inversely proportional to the projection width of the object in that diffraction direction. Based on this finding we have developed a nondestructive two-dimensional surface mapping technique with a 20-nm resolution.

Original language	English
Title of host publication	2007 Conference on Lasers and Electro-Optics - Pacific Rim, CLEO/PACIFIC RIM
DOIs	https://doi.org/10.1109/CLEOPR.2007.4391662
Publication status	Published - 2007
Event	2007 Conference on Lasers and Electro-Optics - Pacific Rim, CLEO/PACIFIC RIM - Seoul, Korea, Republic of Duration: 26 Aug 2007 → 31 Aug 2007

Publication series

Name	Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest

Conference

Conference	2007 Conference on Lasers and Electro-Optics - Pacific Rim, CLEO/PACIFIC RIM
Country/Territory	Korea, Republic of
City	Seoul
Period	26/08/07 → 31/08/07

Access to Document

10.1109/CLEOPR.2007.4391662

Cite this

Moon, S., Shim, J. B., Lee, S. B., Yang, J., Kim, S. W., Lee, J. H., & An, K. (2007). Surface mapping of 2-D opaque microscopic objects via forward shadow diffraction. In 2007 Conference on Lasers and Electro-Optics - Pacific Rim, CLEO/PACIFIC RIM Article 4391662 (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest). https://doi.org/10.1109/CLEOPR.2007.4391662

@inproceedings{4d8307e33c124c4f8f5a12f8c1d5684f,

title = "Surface mapping of 2-D opaque microscopic objects via forward shadow diffraction",

abstract = "We have found that the angular width between two adjacent local minima on the forward diffraction pattern of an opaque convex object is inversely proportional to the projection width of the object in that diffraction direction. Based on this finding we have developed a nondestructive two-dimensional surface mapping technique with a 20-nm resolution.",

author = "Songky Moon and Shim, \{Jeong Bo\} and Lee, \{Sang Bum\} and Juhee Yang and Kim, \{Sang Wook\} and Lee, \{Jai Hyung\} and Kyungwon An",

year = "2007",

doi = "10.1109/CLEOPR.2007.4391662",

language = "English",

isbn = "1424411734",

series = "Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest",

booktitle = "2007 Conference on Lasers and Electro-Optics - Pacific Rim, CLEO/PACIFIC RIM",

}

Moon, S, Shim, JB, Lee, SB, Yang, J, Kim, SW, Lee, JH & An, K 2007, Surface mapping of 2-D opaque microscopic objects via forward shadow diffraction. in 2007 Conference on Lasers and Electro-Optics - Pacific Rim, CLEO/PACIFIC RIM., 4391662, Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest, 2007 Conference on Lasers and Electro-Optics - Pacific Rim, CLEO/PACIFIC RIM, Seoul, Korea, Republic of, 26/08/07. https://doi.org/10.1109/CLEOPR.2007.4391662

Surface mapping of 2-D opaque microscopic objects via forward shadow diffraction. / Moon, Songky; Shim, Jeong Bo; Lee, Sang Bum et al.
2007 Conference on Lasers and Electro-Optics - Pacific Rim, CLEO/PACIFIC RIM. 2007. 4391662 (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Surface mapping of 2-D opaque microscopic objects via forward shadow diffraction

AU - Moon, Songky

AU - Shim, Jeong Bo

AU - Lee, Sang Bum

AU - Yang, Juhee

AU - Kim, Sang Wook

AU - Lee, Jai Hyung

AU - An, Kyungwon

PY - 2007

Y1 - 2007

N2 - We have found that the angular width between two adjacent local minima on the forward diffraction pattern of an opaque convex object is inversely proportional to the projection width of the object in that diffraction direction. Based on this finding we have developed a nondestructive two-dimensional surface mapping technique with a 20-nm resolution.

AB - We have found that the angular width between two adjacent local minima on the forward diffraction pattern of an opaque convex object is inversely proportional to the projection width of the object in that diffraction direction. Based on this finding we have developed a nondestructive two-dimensional surface mapping technique with a 20-nm resolution.

UR - https://www.scopus.com/pages/publications/51649086110

U2 - 10.1109/CLEOPR.2007.4391662

DO - 10.1109/CLEOPR.2007.4391662

M3 - Conference contribution

AN - SCOPUS:51649086110

SN - 1424411734

SN - 9781424411733

T3 - Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest

BT - 2007 Conference on Lasers and Electro-Optics - Pacific Rim, CLEO/PACIFIC RIM

T2 - 2007 Conference on Lasers and Electro-Optics - Pacific Rim, CLEO/PACIFIC RIM

Y2 - 26 August 2007 through 31 August 2007

ER -

Surface mapping of 2-D opaque microscopic objects via forward shadow diffraction

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