Abstract
50-period SiO2/SiOx layers have been prepared on Si wafers by ion beam sputtering deposition and subsequently annealed to form Si nanocrystals (NCs) in the SiOx layer. The integrated photoluminescence (PL) intensity of the samples with x ≤ 1.6 increases on decreasing the temperature down to a certain temperature named as TC, but below TC, it decreases. TC is maintained at 95 K, almost irrespective of x. The rate of decrease of the PL below TC gets slower as x increases up to 1.6, and at x ≤ 1.8, the PL intensity shows a monotonic increase with decreasing temperature. This phenomenon is strongly related to the change in the temperature dependence of the PL decay rate at around TC as x varies. These results can be explained by the fact that the PL behaviours are increasingly influenced by the NCs' environment such as the defect states of the Si NCs/SiO2 interfaces as x increases.
Original language | English |
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Article number | 005 |
Pages (from-to) | 1339-1342 |
Number of pages | 4 |
Journal | Journal Physics D: Applied Physics |
Volume | 40 |
Issue number | 5 |
DOIs | |
Publication status | Published - 7 Mar 2007 |