Abstract
Undoped ZnO films of 100 nm thickness have been deposited on p-type Si (100) substrates at room temperature by radio-frequency magnetron sputtering and subsequently annealed in a rapid thermal annealing apparatus under a nitrogen ambient by varying annealing temperature (TA) from 973 to 1273 K in steps of 100 K for 3 min. Photoconductivity spectra in the UV and visible ranges are measured as a function of TA in the range of measurement temperatures (T) from 80 to 350 K under an applied bias of 1 V. For the samples annealed at TA = 973 and 1073 K, negative photoconductivity is observed below T = 300 K, and its absolute magnitude increases as TA increases. In contrast, the photoconductivity of the samples at TA ≥ 1173 K is always positive, irrespective of T, and its magnitude increases as TA increases. These PC behaviors are discussed based on the defect states at the grain boundaries of the ZnO films.
Original language | English |
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Pages (from-to) | 305-308 |
Number of pages | 4 |
Journal | Thin Solid Films |
Volume | 518 |
Issue number | 1 |
DOIs | |
Publication status | Published - 2 Nov 2009 |
Bibliographical note
Funding Information:This work was supported by a grant from the Kyung Hee University in 2009. (KHU-20090754) H. R. Kim acknowledges a support from the Kyung Hee University Graduate School Scholarship for Outstanding Research Papers in 2nd semester, 2008.
Keywords
- Defect states
- Grain boundary
- Negative photoconductivity
- Scanning Electron Microscopy
- Sputtering
- Zinc oxide