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TFT technologies for large area electronics

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Citations (Scopus)

Abstract

The TFT technologies developed at ADRC on amorphous silicon (a-Si), polycrystalline silicon (poly-Si) and organic semiconductor are summarized. The a-Si TFT was used for visible light detection as well as switching devices of AMLCD. As a result, the AMLCDs with imbedded sensor or imbedded backlight control sensor were developed. Poly-Si is used for mobile applications with smart design and integrated circuits. We developed a new CW laser crystallization for the super-grain poly-Si and disk-shaped grain growth using a Ni mediated solid phase crystallization. The organic TFT was developed with a self-organized process and printable TFT was fabricated for the low-cost array on plastic.

Original languageEnglish
Title of host publicationECS Transactions - 2007 International Conference on Semiconductor Technology for Ultra Large Scale Integrated Circuits and Thin Film Transistors, ULSIC vs.TFT
PublisherElectrochemical Society Inc.
Pages39-43
Number of pages5
Edition1
ISBN (Electronic)9781566775663
ISBN (Print)9781604238921
DOIs
Publication statusPublished - 2007
Event2007 International Conference on SemiconductorTechnology for Ultra Large Scale Integrated Circuits and Thin Film Transistors, ULSIC vs. TFT - Barga, Italy
Duration: 29 Jul 20073 Aug 2007

Publication series

NameECS Transactions
Number1
Volume8
ISSN (Print)1938-5862
ISSN (Electronic)1938-6737

Conference

Conference2007 International Conference on SemiconductorTechnology for Ultra Large Scale Integrated Circuits and Thin Film Transistors, ULSIC vs. TFT
Country/TerritoryItaly
CityBarga
Period29/07/073/08/07

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